Directional acoustic response of a silicon disc‐based microelectromechanical systems structure
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چکیده
منابع مشابه
Directional acoustic response of a silicon disc-based microelectromechanical systems structure
David James Mackie1, Joseph Curt Jackson1, James Gordon Brown2, Deepak Uttamchandani2, James Frederick Charles Windmill1 Department of Electronic and Electrical Engineering, Centre for Ultrasonic Engineering, University of Strathclyde, Glasgow G1 1XW, United Kingdom Department of Electronic and Electrical Engineering, Centre for Microsystems and Photonics, University of Strathclyde, Glasgow G1 ...
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ژورنال
عنوان ژورنال: Micro & Nano Letters
سال: 2014
ISSN: 1750-0443,1750-0443
DOI: 10.1049/mnl.2013.0677